Polyethersulfone membrane coated with nanoporous parylene for ultrafiltration

Gunawan Setia Prihandana, Hikaru Ito, Yuya Nishinaka, Yoshihiko Kanno, Norihisa Miki

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


In this letter, we describe the surface modification of a polyethersulfone (PES) membrane by deposition of a nanoporous parylene film. The glycerin vapor during parylene deposition prevented parylene from forming over the pores. Water contact angle measurements and diffusion measurements revealed that parylene could be coated onto the PES membrane while keeping some pores open when the amount of dimer was properly controlled. The parylene-coated membrane prepared by our modified deposition process gave higher diffusion values than that prepared conventionally. Moreover, the platelet activation and adhesion were suppressed after coating parylene; this result indicated that the parylene-coated PES membranes showed improved biocompatibility. This advancement has a potential benefit for ultrafiltration applications.

Original languageEnglish
Article number6353107
Pages (from-to)1288-1290
Number of pages3
JournalJournal of Microelectromechanical Systems
Issue number6
Publication statusPublished - 2012
Externally publishedYes


  • Nanoporous parylene
  • polyethersulfone (PES) membrane
  • surface modification
  • ultrafiltration


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